CHIEN LAB Biosystem IC devices

Two papers accepted to MEMS conference!

Congratulations to the team on two MEMS papers acceptance! Paper titles: “Subtractive nanofluidics in 65-nm CMOS copper BEOL achieve 100-nmm width” “CMOS-embedded microfluidics for channel-addressable parallel readout of SPAD fluorescence lifetime sensors”

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Paper acceptance